Razy, Ahmad Hafiz Mohamad (2018) Design And Implementation Of Liquid-Based Fine-Tunable Solenoid Mems Inductor. Masters thesis, Universiti Sains Malaysia.
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Abstract
Peranti pasif seperti pengaruh litar bersepadu memainkan peranan penting dalam litar frekuensi radio. Walau bagaimanapun, prestasi kualiti faktor bagi pengaruh jenis ini dihadkan atas pengaruh substrat yang tinggi. Oleh itu, dalam tesis ini, bendalir boleh laras-halus pengaruh sistem mikroelektronik mekanikal solenoid dibentangkan untuk aplikasi frekuensi ultra tinggi. Bendalir Ferro berasaskan hidrokarbon ringan digunakan dalam reka bentuk untuk mencapai penalaan halus bagi nilai pengaruh. Tiub mikro bertindak sebagai saluran untuk penalaan. Tambahan daripada itu, teknik ‘wire bonding’ digunakan bagi tujuan mengurangkan rintangan siri, kehilangan substrat, dan kehilangan resonan kendiri. Wayar emas digunakan bagi mengikat bahagian pinggir dua pad logam. Ikatan dilakukan secara diagonal dengan menyeberangi bahagian atas tiub mikro. Pengaruh direka bentuk menggunakan ANSYS HFSS dan bacaan pengukuran ditetapkan pada frekuensi 400 MHz bagi tujuan pembuktian konsep. Pada frekuensi 400 MHz, keputusan simulasi menunjukkan kualiti faktor meningkat dari 10 hingga 12 manakala nilai pengaruh berubah dari 7.48 nH hingga 9.06 nH bagi saluran tiub kosong dan saluran tiub yang telah disuntik dengan bendalir Ferro. Keputusan menunjukkan julat penalaan sebanyak 21% berjaya dicapai. Namun demikian, keputusan bagi bacaan pengukuran pengaruh menunjukkan, pada frekuensi 400 MHz, nilai kualiti faktor secara perlahan menurun dari 6.79 kepada 5.49 dengan nilai pengaruh meningkat dari 21.40 nH kepada 22.40 nH bagi saluran tiub kosong dan saluran tiub yang telah disuntik dengan bendalir Ferro. Keputusan ini telah memberikan bacaan julat penalaan sebanyak 4.67%. Kesimpulannya, reka bentuk berasaskan bendalir boleh laras-halus pengaruh sistem mikroelektronik mekanikal solenoid berjaya dicapai untuk aplikasi frekuensi ultra tinggi. _______________________________________________________________________________________________________ Passive devices such as on-chip inductors play an important role in radio frequency circuits. However, these types of inductor lacked in terms of quality factor performance due to high substrate parasitic. Thus, in this thesis, liquid-based fine-tunable solenoid microelectronic mechanical systems inductor with high quality factor is presented for ultra-high frequency applications. The light hydrocarbon-based ferrofluid is utilised in the design to achieve a fine-tuning inductance. A micro-tube acts as a channel for tunability. In addition to that, wire bonding technique is applied to reduce series resistance, substrate loss, and self-resonance loss. A gold wire is bonded diagonally at the edge of metal pad by crossing it over the top of the micro-tube. The designed inductor was simulated using ANSYS HFSS and measured at a frequency of 400 MHz for proof-of-concept work. At 400 MHz, simulation results show that the quality factor increases from 10 to 12 with inductance values tuning from 7.48 nH to 9.06 nH for empty channel and fully-injected channel, respectively. Thus, tuning range of 21% is successfully achieved. The measured results however, reveals that, at 400 MHz, the quality factor gradually decreases from 6.79 to 5.49 with inductance values tuning from 21.40 nH to 22.40 nH for empty channel and fully-injected channel, respectively, giving a tuning range of 4.67%. In conclusion, the design of liquid-based fine-tunable solenoid microelectronic mechanical systems inductor is proven workable for ultra-high frequency applications.
| Item Type: | Thesis (Masters) |
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| Uncontrolled Keywords: | Full text is available at http://irplus.eng.usm.my:8080/ir_plus/institutionalPublicationPublicView.action?institutionalItemId=4616 |
| Subjects: | T Technology T Technology > TA Engineering (General). Civil engineering (General) > TA401-492 Materials of engineering and construction. Mechanics of materials |
| Divisions: | Kampus Kejuruteraan (Engineering Campus) > Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral (School of Material & Mineral Resource Engineering) > Thesis |
| Depositing User: | Mr Mohd Jasnizam Mohd Salleh |
| Date Deposited: | 06 May 2019 04:42 |
| Last Modified: | 06 May 2019 04:42 |
| URI: | http://eprints.usm.my/id/eprint/44284 |
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