Cheah, Wei Kian (2017) Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film. Project Report. Universiti Sains Malaysia, Pusat Pengajian Kejuruteraan Bahan Sumber Mineral. (Submitted)
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Abstract
Calcium copper titanate (CCTO) thin film with high dielectric permittivity (ε), low tangent loss (tan δ) and have high temperature phase stability up to 300 °C is very importance for several advanced microelectronic applications. The electrical and optical properties are depended on the structural and surface morphology of CCTO thin film. This project aims to study effect of deposition temperature and type of substrates (ITO, FTO and glass) on the structural, surface morphology and optical properties of sputtered CCTO thin film. Firstly, CCTO thin films were deposited on different type of substrates (ITO, FTO and glass) at deposition temperatures of 100, 150, 200 and 250 °C by RF magnetron sputtering in Argon atmosphere. The structural, surface morphology and optical properties of the deposited CCTO thin film have been studied by X-ray diffraction (XRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM), energy-dispersive X-ray spectroscopy (EDX) and ultraviolet-visible (UV-vis) spectrophotometer. XRD analysis showed CCTO thin films on ITO and FTO substrates have a highest intensity peak at (022) while CCTO thin film on glass substrates showed almost amorphous in structure. Besides, crystallinity of CCTO thin film on ITO and FTO increased with increase of deposition temperature. FESEM only able to reveal the crystallite size of CCTO thin film on ITO substrates and the crystallite size is increased with increase of deposition temperature. AFM analysis showed the blank FTO substrates with 6 times rougher than blank ITO and glass substrates caused the CCTO thin film on it have significant higher in surface roughness and pore size. This is due to CCTO thin film are highly dependent on the surface feature of substrate. Increase of deposition temperature have increased the surface roughness (Ra) and pore size respectively. In addition, Tauc plot method was used to estimate the optical energy band gap of the deposited CCTO thin film. Optical energy band gap of the CCTO were decreased from 3.50 eV to 3.14 eV (ITO), 3.52 eV to 3.10 eV (FTO) and 3.58 eV to 3.10 eV (glass) as deposition temperature increased from 100 °C to 250 °C. Therefore, favourable CCTO thin film properties can be possibly obtained for particular application by controlling deposition temperature and using different type of substrates.
| Item Type: | Monograph (Project Report) |
|---|---|
| Subjects: | T Technology T Technology > TA Engineering (General). Civil engineering (General) > TA401-492 Materials of engineering and construction. Mechanics of materials |
| Divisions: | Kampus Kejuruteraan (Engineering Campus) > Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral (School of Material & Mineral Resource Engineering) > Monograph |
| Depositing User: | Mr Mohamed Yunus Mat Yusof |
| Date Deposited: | 28 Apr 2022 04:07 |
| Last Modified: | 28 Apr 2022 04:07 |
| URI: | http://eprints.usm.my/id/eprint/52441 |
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