Wong, Wah Seng (2012) Design, Fabrication And Performance Analysis Of Su-8 Piezoresistive Micro Pressure Sensor. Masters thesis, Perpustakaan Hamzah Sendut.
![[img]](http://eprints.usm.my/style/images/fileicons/application_pdf.png) |
PDF
Download (31MB) |
Abstract
In this thesis, su-8 piezoresistive micro pressure sensor is designed, modeled and fabricated, and its performance is characterized. As piezoresistive micro pressure sensor is commonly fabricated using silicon, many issues and challenges such as selection of piezoresistor material, release method and sensitivity enhancement need to be tackled in order to develop successful su-8 piezoresistive micro pressure sensor. The novelty of this research focuses on integrating micro pressure sensor with su-8/silver composite (su-81ag) as piezoresistor, ohp transparency as substrate and novel dry release method as release protocol. Su-8 is selected as structural material for micro pressure sensor due to its low cost and easy to fabricate. Besides, the low young's modulus of su-8 provides better sensitivity compared to silicon. Analytical method using small deflection theories of plate and fmite element analysis (fea) via ansys® are carried out to characterize the diaphragm thickness. Both methods show thickness at 147j.1m provides optimum sensitivity and linearity for 6000j.1m square su-8 diaphragm. Fea is also applied to find the most suitable geometry and the best location of piezoresistors for improved sensitivity. A simple and low cost protocol is established to fabricate su-8 based pressure sensor.
| Item Type: | Thesis (Masters) |
|---|---|
| Subjects: | Q Science > QC Physics > QC1 Physics (General) |
| Divisions: | Pusat Pengajian Sains Fizik (School of Physics) > Thesis |
| Depositing User: | Mr Hasmizar Mansor |
| Date Deposited: | 01 Apr 2026 03:52 |
| Last Modified: | 01 Apr 2026 03:52 |
| URI: | http://eprints.usm.my/id/eprint/63834 |
Actions (login required)
 |
View Item |
