GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications

Sheikh Sarmast, Hadi Mahmodi (2017) GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications. PhD thesis, Universiti Sains Malaysia.

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Abstract

Di dalam tesis ini, filem aloi semikonduktor Ge1-xSnx telah disediakan melalui sistem percikan magnetron RF dalam usaha menumbuhkan filem pada suhu rendah untuk mengelakan pengasingan Sn pada permukaan. Sifat struktur, optik dan elektrik lapisan tersebut di atas substrat Si disiasat untuk aplikasi optoelektronik In this thesis, the Ge1-xSnx semiconductor alloy films have been prepared through RF magnetron sputtering to grow the film at low temperature to suppress the Sn surface segregation. The structural, optical, electrical properties of the grown Ge1-xSnx alloy films on silicon (Si) substrate were investigated for optoelectronic applications

Item Type:	Thesis (PhD)
Subjects:	Q Science > QC Physics > QC1-999 Physics
Divisions:	UNSPECIFIED
Depositing User:	Mr Erwan Roslan
Date Deposited:	13 Feb 2018 03:32
Last Modified:	12 Apr 2019 05:24
URI:	http://eprints.usm.my/id/eprint/38851

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