Murad, Marfaiza
(2014)
Life Cycle Assessment: Case Study In Wafer Fabrication.
Masters thesis, Perpustakaan Hamzah Sendut.
Abstract
Wafer fabrication is the heart of semiconductor manufacturing process and is
regards as the core of electronic industries in Malaysia. As more plants of wafer
fabrication are being set up in Malaysia, a great concern for the environmental
impact has emerged and needs to be investigated. This research has been conducted
in order to evaluate the environmental impact of two wafer types - Complementary
Metal-Oxide-Semiconductor (CMOS) and Insulated Gate Bipolar Transistors
(lGBT) fabrication, based on life cycle assessment (LCA) approach. In this study,
only raw material and energy flows that entering and exiting the manufacturing
plants were considered. This is also known as "gate-to-gate" study. The System for
Integrated Environmental Assessment Product (SimaPro) 7.1 modelling software
with Eco-Indicator 99 method were utilized to evaluate the potential environmental
impacts of wafer fabrication processes. Based on the results, damage to resources
due to fossil fuel depletion was identified as the worst environmental impact for both
wafer manufacturing caused by the huge amount of electricity consumption.
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