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Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Aw, Kean Chin (2002) Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]. PhD thesis, Universiti Sains Malaysia.

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Abstract

Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.

Item Type:Thesis (PhD)
Subjects:Q Science > QC Physics
ID Code:5568
Deposited By:ARKM Al Rashid Automasi
Deposited On:18 Nov 2008 21:21
Last Modified:18 Nov 2008 21:21

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