Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Aw, Kean Chin (2002) Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]. PhD thesis, Universiti Sains Malaysia.

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Abstract

Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.

Item Type: Thesis (PhD)
Subjects: Q Science > QC Physics
Divisions: Pusat Pengajian Sains Komputer (School of Computer Sciences) > Thesis
Depositing User: ARKM Al Rashid Automasi
Date Deposited: 18 Nov 2008 13:21
Last Modified: 14 Apr 2017 12:18
URI: http://eprints.usm.my/id/eprint/5568

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