Yeoh, Lai Seng
(2014)
Al-Ta2O5-GaN
Semiconductor Device Structure.
PhD thesis, Universiti Sains Malaysia.
Abstract
GaN-based semiconductor devices have been extensively investigated for used in high
power and high temperature device applications in order to replace Si which is no longer capable
to fulfill these ever-increasing demands. The characteristics of low leakage current, low oxide
charge density, and high oxide capacitance would be necessary for device-quality GaN-based
MOS devices.
Peranti semikonduktor berasaskan GaN telah dikaji secara menyeluruh bagi penggunaan
dalam kuasa dan suhu tinggi bagi menggantikan Si yang tidak dapat lagi memenuhi keperluan
tersebut. Sifat seperti kebocoran arus yang rendah, ketumpatan cas oksida yang rendah, dan
kapasitan yang tinggi amat diperlukan untuk peranti MOS berasaskan GaN berkualiti tinggi.
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