Cheon'g, Kuan Yew and Hussain, Luay Bakir (2007) Investigation of low dielectric constant (k) films for deep sub-micron CMOS application. Project Report. Universiti Sains Malaysia.
Full text not available from this repository.Abstract
Silica (Si02) thin film on Si with low dielectric constant (k) properties has been systematically prepared and investigated. Two types of this low-k material have been deposited on Si via sol-gel spin-on coating. Filem nipis silika (Si02) yang berpemalar dieletrik rendah endap di atas Si tlah disediakan dan dikaji dengan sistematik. Dua jenis film nipis telah disediakan menggunkan pemutaran sol-gel.
| Item Type: | Monograph (Project Report) |
|---|---|
| Subjects: | T Technology > TN Mining Engineering. Metallurgy > TN1-997 Mining engineering. Metallurgy |
| Divisions: | Kampus Kejuruteraan (Engineering Campus) > Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral (School of Material & Mineral Resource Engineering) |
| Depositing User: | Mr Erwan Roslan |
| Date Deposited: | 05 Jun 2009 03:39 |
| Last Modified: | 21 Sep 2017 03:16 |
| URI: | http://eprints.usm.my/id/eprint/10419 |
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