Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb].

Siow, Yuen Tien (2008) Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model : A Case Study [TR940. S618 2008 f rb]. Masters thesis, Universiti Sains Malaysia.

[img]
Preview
PDF
Download (274Kb) | Preview

    Abstract

    Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. The industry of semiconductor wafer fabrication (“fab”) has invested a huge amount of capital on the manufacturing equipments particular in photolithography

    Item Type: Thesis (Masters)
    Subjects: T Technology > TR Photography > TR925-1050 Photomechanical processes
    Divisions: Kampus Kejuruteraan (Engineering Campus) > Pusat Pengajian Kejuruteraan Mekanikal (School of Mechanical Engineering)
    Depositing User: MHAH Hazlee Abdul Halil
    Date Deposited: 28 Apr 2009 15:20
    Last Modified: 13 Jul 2013 12:12
    URI: http://eprints.usm.my/id/eprint/9613

    Actions (login required)

    View Item
    Share