Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate

Kasim, Nabihah (2022) Deposition And Characterisation Of Solution Processed Indium Gallium Zinc Oxide Thin Film On Silicon Substrate. PhD thesis, Universiti Sains Malaysia.

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Abstract

This research was conducted with an objective to deposit optimum polycrystalline indium gallium zinc oxide (IGZO) on silicon (Si) substrate by using solution processed method. Specifically, sol-gel method was selected to prepare IGZO precursor solution and spin coating method was used to deposit the film.

Item Type:	Thesis (PhD)
Subjects:	T Technology > TK Electrical Engineering. Electronics. Nuclear Engineering
Divisions:	Institut Penyelidikan dan Teknologi Nano Optoelektronik (Institute of Nano Optoelectronics Research and Technology (INOR)) > Thesis
Depositing User:	Mr Aizat Asmawi Abdul Rahim
Date Deposited:	13 Dec 2023 03:25
Last Modified:	13 Dec 2023 03:25
URI:	http://eprints.usm.my/id/eprint/59671

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