Kasim, Nabihah and Hassan, Zainuriah and Way, Foong Lim and Hock, Jin Quah
(2020)
A Comparison Study Of ZnO, InZnO, GaZnO And InGaZnO Physical Properties And Optical Bandgap.
In: 5th Meeting of Malaysia Nitrides Research Group (MNRG 2020), 1-2 December 2020.
Abstract
Comparison between ZnO, InZnO, GaZnO and InGaZnO (IGZO) thin films prepared using spin coating method were studied in detail to find out contribution of In and
Ga towards changes in the physical properties. From FESEM, ZnO has revealed an uneven and non-uniform distribution of grains on the film. The addition of In has caused the grains to be more separated and inconsistent in sizes. Ga, on the other hand has transformed the grain to be more hexagonal in shapes and the surface was more packed with grains. AFM analysis
has shown dissimilar topographies and surface roughness values to compliment FESEM results. Additionally, optical band gap of ZnO, InZnO, GaZnO and InGaZnO thin films were
also calculated and discussed in this study.
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