Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD

Siowwoon, Ng and Sau, Siong Tneh and Fong, Kwong Yam and Hassan, Zainuriah (2017) Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD. In: The International Conference of Solid State Science and Technology (ICSSST 2017).

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Abstract

This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination.

Item Type: Conference or Workshop Item (Paper)
Subjects: Q Science > QC Physics > QC1-999 Physics
Divisions: Institut Penyelidikan dan Teknologi Nano Optoelektronik (Institute of Nano Optoelectronics Research and Technology (INOR)) > Conference or Workshop Item
Depositing User: Mr Aizat Asmawi Abdul Rahim
Date Deposited: 23 Apr 2021 01:58
Last Modified: 23 Apr 2021 01:58
URI: http://eprints.usm.my/id/eprint/49005

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