Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates

Asri, R. I. M. and Hamzah, N. A. and Ahmad, M. A. and Taib, M. Ikram Md and Sahil, S. M. S. and Hassan, Z. (2019) Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates. In: International Conference On Semiconductor Materials Technology.

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Abstract

The optical and electrical properties of indium tin oxide (ITO) thin films grown on soda-lime glass substrates using a radio frequency (RF) magnetron sputtering technique were studied as a function of the sputtering RF power. Fixed 100nm thickness of ITO films were deposited on the soda-lime glass substrates at 300°C, using RF powers ranging between 50 to 150W. The optical and electrical properties of the sputtered ITO films were characterized by Ultraviolet–Visible Spectroscopy (UV-Vis), Hall Effect Measurement and Atomic Force Microscope (AFM). Varying the substrate RF sputtering power affected surface roughness, resistivity and transmittance values.

Item Type:	Conference or Workshop Item (Paper)
Subjects:	Q Science > QC Physics > QC1-999 Physics
Divisions:	Institut Penyelidikan dan Teknologi Nano Optoelektronik (Institute of Nano Optoelectronics Research and Technology (INOR)) > Conference or Workshop Item
Depositing User:	Mr Aizat Asmawi Abdul Rahim
Date Deposited:	13 Apr 2021 00:30
Last Modified:	13 Apr 2021 00:30
URI:	http://eprints.usm.my/id/eprint/48849

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