Fabrication And Physical Characterisation Of Zinc Oxide Thin Films

Lim , Yam Tee (2012) Fabrication And Physical Characterisation Of Zinc Oxide Thin Films. Masters thesis, Universiti Sains Malaysia.

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Abstract

Zinc oxide (ZnO) thin films were deposited on α-0001 sapphire substrates using direct current (d.c.) magnetron sputtering process and annealed at various temperatures in an inert atmosphere to investigate its effect on the ultraviolet (UV) emission, stress, lattice constants, crystallite size as well as the possibility of inducing nanostructure growth. Scanning electron microscope (SEM) and X-ray diffraction (XRD) found that ZnO thin films have a fairly uniform granular surface structure with a preferential c-axis growth direction.

Item Type: Thesis (Masters)
Subjects: L Education > LC Special aspects of education > LC5800-5808 Distance education.
Divisions: Pusat Pengajian Pendidikan Jarak Jauh (School of Distance Education) > Thesis
Depositing User: ASM Ab Shukor Mustapa
Date Deposited: 19 Sep 2018 07:09
Last Modified: 12 Apr 2019 05:26
URI: http://eprints.usm.my/id/eprint/41953

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