SU-8 Piezoresistive Microcantilever For Chemical Sensing Application

Lee, Kok Siong (2011) SU-8 Piezoresistive Microcantilever For Chemical Sensing Application. Masters thesis, Universiti Sains Malaysia.

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Abstract

In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analysis (FEA) has been carried out for SU-8 piezoresistive microcantilever under the surface stress loading to help in improving the piezoresistive strain when designing the cantilever sensor. The analysis result concluded that the SU-8 cantilevers for chemical sensing should have lower length to width (L/W) ratio for higher piezoresistive strain.

Item Type:	Thesis (Masters)
Subjects:	Q Science > QD Chemistry > QD1-999 Chemistry
Divisions:	Pusat Pengajian Sains Kimia (School of Chemistry) > Thesis
Depositing User:	ASM Ab Shukor Mustapa
Date Deposited:	19 Sep 2018 02:14
Last Modified:	12 Apr 2019 05:26
URI:	http://eprints.usm.my/id/eprint/41933

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