Determination of argon fluoride (ArF) excimer laser system and materials diagnosis

Salleh, Mohd Hazimin Mohd and Bidin, Noriah (2004) Determination of argon fluoride (ArF) excimer laser system and materials diagnosis. In: The 4th Annual Seminar of National Science Fellowship NSF 2004 Proceedings. Penerbit Universiti Sains Malaysia, Pulau Pinang, Malaysia, pp. 328-330.

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Abstract

The growing interest in precise fabrication of micro and nano-structures such as optical component, lenses, sensor and devices makes the conventional approach no longer satisfactory for micro scale structure. Now, nano-technology has a big potential to revolutionize everything from medicine, industrial manufacturing and to computer within a few decades.

Item Type:	Book Section
Subjects:	Q Science > Q Science (General) > Q179.9-180 Research
Divisions:	Koleksi Penganjuran Persidangan (Conference Collection) > Annual Seminar National Science Fellowship (NSF)
Depositing User:	Puan Sukmawati Muhamad
Date Deposited:	14 Sep 2018 07:37
Last Modified:	19 Nov 2018 04:00
URI:	http://eprints.usm.my/id/eprint/41886

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