Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film

Subramani, Shanmugan and Devarajan, Mutharasu (2016) Structural and Optical Properties of Ultra-high Pure Hot Water Processed Ga2O3 Thin Film. Materials Science, 22 (2). pp. 166-169. ISSN 1068-820X

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Abstract

Thin film based gas sensor is an advanced application of thin film especially Ga2O3 (GO) thin film gas sensor is useful for high temperature gas sensor. The effect of moisture or environment on thin film properties has more influence on gas sensing properties. Radio Frequency sputtered Ga2O3 thin film was synthesized and processed in ultra-high pure hot water at 95

Item Type: Article
Subjects: Q Science > QC Physics > QC1-999 Physics
Divisions: Pusat Pengajian Sains Fizik (School of Physics) > Article
Depositing User: Mr Noorazilan Noordin
Date Deposited: 26 Oct 2017 00:51
Last Modified: 26 Oct 2017 00:51
URI: http://eprints.usm.my/id/eprint/37231

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