Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process

Jaafar, Haslina (2014) Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process. PhD thesis, Universiti Sains Malaysia.

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Abstract

Low voltage RF MEMS switch that can be integrated with other circuits is required in the consumer product, industrial and telecommunication sector. Voltage actuation less than 10 V with simple fabrication process is desirable as most of applications need low power system with low fabrication cost. Suis RF MEMS bervoltan rendah dan boleh berintegrasi dengan litar lain sangat diperlukan di dalam produk pengguna, sektor industri dan telekomunikasi. Voltan penggerak kurang daripada 10 V dengan proses fabrikasi yang mudah sangat dikehendaki kerana kebanyakan aplikasi memerlukan sistem kuasa rendah dengan kos fabrikasi yang rendah.

Item Type:	Thesis (PhD)
Subjects:	T Technology > TK Electrical Engineering. Electronics. Nuclear Engineering > TK1-9971 Electrical engineering. Electronics. Nuclear engineering
Divisions:	Kampus Kejuruteraan (Engineering Campus) > Pusat Pengajian Kejuruteraaan Elektrik & Elektronik (School of Electrical & Electronic Engineering) > Thesis
Depositing User:	Administrator Automasi
Date Deposited:	09 Jun 2015 08:13
Last Modified:	12 Apr 2019 05:26
URI:	http://eprints.usm.my/id/eprint/29034

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