PPKBSM, Pusat Pengajian Bahan & Sumber Mineral (2011) Structural and optical properties of ZnO thin films deposited using atomic layer deposition technique. In: 3rd International Workshop on Nanotechnology & Application 2011, 10 – 12 November 2011, Vung Tau, Vietnam.
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Abstract
ZnO films have been successfully deposited by Atomic Layer Deposition (ALD) using Diethylzinc (DEZn) and water (H2O) as precursors.
| Item Type: | Conference or Workshop Item (Paper) |
|---|---|
| Subjects: | T Technology > TN Mining Engineering. Metallurgy > TN1-997 Mining engineering. Metallurgy |
| Divisions: | Kampus Kejuruteraan (Engineering Campus) > Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral (School of Material & Mineral Resource Engineering) |
| Depositing User: | Mr. Hazaralie Ramlee |
| Date Deposited: | 01 Apr 2012 22:56 |
| Last Modified: | 13 Jul 2013 09:59 |
| URI: | http://eprints.usm.my/id/eprint/25179 |
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