Effects Of Post-Deposition Annealing Temperature And Time On Physical Properties Of Metal-Organic Decomposed Lanthanum Cerium Oxide Thin Film.W. , F. Lim and K. , Y. Cheong and Lockman, Z. (2010) Effects Of Post-Deposition Annealing Temperature And Time On Physical Properties Of Metal-Organic Decomposed Lanthanum Cerium Oxide Thin Film. In: 5th Thinfilm 2010 Conference, 04 August 2010, Harbin China.
AbstractLanthanum cerium oxide (LaxCeyOz) precursor was prepared using metal-organic decomposition method. The effects of post-deposition annealing temperatures (400-1000 °C) and annealing time (15-120 minutes) in argon ambient on physical properties of the deposited film were investigated.
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